Porous aluminum nitride ceramic plate

Porous aluminum nitride ceramic plate is a new generation of functional ceramic material that integrates a high thermal conductivity aluminum nitride matrix and a controllable pore structure. It not only inherits the excellent thermal conductivity and insulation properties of aluminum nitride ceramics, but also achieves dual functions of gas permeation and thermal management through fine pore structure design. It is an ideal choice for semiconductor vacuum suction cups, high-performance heat exchangers, and high-temperature gas filtration fields.

Product FAQ: What core issues can it solve for you?
Q: Can this product solve the problem of unstable wafer fixation and poor temperature control in semiconductor etching process, resulting in a decrease in yield?
A: Okay. Our porous aluminum nitride ceramic plates can be used as electrostatic chucks or vacuum suction cups. Its uniform microporous structure can achieve fast and uniform vacuum adsorption, and with a thermal conductivity of up to 170-200 W/(m · K), it can quickly remove the heat generated during wafer processing, effectively solving the problems of unstable fixation and thermal accumulation.
Q: We are developing efficient fuel cells or hydrogen production equipment and need a gas diffusion layer material that is both corrosion-resistant and capable of efficiently conducting heat. Is this product suitable?
A: Very applicable. Porous aluminum nitride ceramic plates have extremely high chemical stability, and their porous structure provides a large number of microchannels for gases, enabling uniform diffusion of gases; And its high thermal conductivity can ensure a highly uniform temperature field in the reaction area, significantly improving reaction efficiency and equipment lifespan.
Q: In high-temperature flue gas treatment, metal filter materials are prone to oxidation and corrosion. Can this ceramic plate replace them?
A: Absolutely possible. Porous aluminum nitride ceramic plates are resistant to high temperatures (up to 800 ° C or above), oxidation, acid and alkali corrosion, and can withstand harsh high-temperature dust removal conditions. Its unique pore structure ensures low pressure loss while providing extremely high filtration accuracy for micron sized particles.

Core advantages of the product
Our porous aluminum nitride ceramic plates have the following significant features in design and manufacturing:

1. Coexistence of high thermal conductivity and insulation: While achieving a porous structure, the aluminum nitride ceramic body maintains the characteristics of high thermal conductivity (≥ 170 W/m · k) and high body resistivity (>10 ¹⁴Ω· cm), perfectly solving the dual needs of heat dissipation and insulation.
2. Uniform and controllable pore size: Advanced pore forming technology is used to accurately control porosity (20% -60%) and pore size range (from sub micron to hundred micron), ensuring the uniformity of fluid distribution.
3. Excellent mechanical strength: After high-temperature sintering, the porous skeleton is sturdy, with high bending strength, able to withstand certain pressure differentials and mechanical processing, and not easily broken or chipped.
4. Corrosion and thermal shock resistance: Excellent chemical inertness and low coefficient of thermal expansion enable it to withstand drastic temperature changes and acidic/alkaline environments.

Product specifications and customization
In order to meet the demanding needs of customers from different industries, we offer a variety of standard specifications and flexible customization services:
-Standard size: Available in specifications such as 100mm x 100mm, 150mm x 150mm, with a thickness range of 0.5mm -10mm.
-Customization scope:
-Size customization: Circular, ring-shaped, and irregular parts can be customized according to the drawings, with a maximum size of up to 200mm x 200mm.
-Aperture customization: Customize the average aperture (0.5 μ m-100 μ m) based on filtration accuracy or flow requirements.
-Performance customization: Optimize porosity and skeleton density based on thermal conductivity or strength requirements.
-Machining services: providing precision drilling, cutting, and surface grinding and polishing services.

Customer Application Cases
Case 1: A semiconductor equipment manufacturer (vacuum suction cup application)
-Requirement: During the development of a 12 inch wafer wet cleaning equipment, the company found that traditional corrugated sheets had unstable adsorption, resulting in residual cleaning solution at the edge of the wafer and uneven heating during the drying process.
-Solution: We have customized a porous aluminum nitride ceramic plate with a diameter of 300mm and a thickness of 3mm, with an average pore size controlled at 10 μ m, and subjected it to fine planar grinding treatment.
-Final effect: After the transformation, the wafers are uniformly adsorbed during high-speed rotation cleaning without any slipping phenomenon. Thanks to the high thermal conductivity of aluminum nitride, the surface temperature difference of the wafer is controlled within ± 1.5 ℃ during the subsequent rapid heating and drying stage, and the cleaning uniformity is improved by about 30%. The overall equipment yield is significantly improved.
Case 2: A hydrogen energy technology company (heat exchange and diffusion components)
-Requirement: When developing a new methanol reforming hydrogen production reactor, the customer requires a medium layer that can support the catalyst, efficiently conduct the heat of the reforming reaction, and ensure uniform passage of the reforming gas.
-Solution: We provide multiple porous aluminum nitride ceramic plate samples with porosity ranging from 45% to 50% for reactor flow channel design. This material exhibits excellent stability in a working environment of 550 ° C.
-Final effect: Test data shows that after using porous aluminum nitride plates, the radial temperature difference inside the reactor was reduced from 10 ° C to 3 ° C, effectively avoiding catalyst sintering caused by local overheating. The methanol conversion rate was increased by 8%, and there was no attenuation after continuous operation for 1000 hours.

If you are looking for high-performance ceramic materials that can balance thermal conductivity, insulation, and fluid control, or need to customize porous aluminum nitride ceramic plates for specific working conditions, please contact our technical team to obtain samples or provide detailed drawings for sampling!

Brudeze Ceramics supplies and sells a wide range of high-quality quartz glass, including alumina ceramics, zirconia ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, boron carbide ceramics, bioceramics, machinable ceramics, etc. We can meet the customization requirements of various ceramic products.