Aluminum nitride ceramic porous block

In the extreme environment of modern industry, thermal management and precision filtration are often the key bottlenecks that determine equipment performance and lifespan. Aluminum nitride ceramic porous block is an advanced ceramic material that combines high thermal conductivity, corrosion resistance, and controllable porous structure. It can not only conduct heat quickly like metal, but also achieve precise filtration and fluid distribution through its uniform micrometer sized pores, making it an ideal choice for breaking through the limits of traditional materials in the fields of semiconductors, optoelectronics, and chemical engineering.

Product FAQ: Your Core Concerns
Q: My device heats up severely, ordinary materials dissipate heat too slowly, and the weight is too large. Is there a solution that can both lightweight and quickly conduct heat?
Answer: Aluminum nitride ceramics not only have a thermal conductivity of up to 170-200 W/(m · K), far exceeding aluminum oxide ceramics, but also significantly reduce weight through porous structure design, achieving a perfect balance between efficient heat dissipation and lightweight.
Q: What should be done if the metal filter element is prone to corrosion and blockage during high-temperature gas filtration in strong acid and alkali environments, and its lifespan is too short?
Answer: Our aluminum nitride porous block has excellent chemical inertness, acid and alkali corrosion resistance, and the porous structure has good permeability and is not easily blocked. It can work stably for a long time under harsh working conditions, significantly reducing the frequency of replacement.
Q: I need to customize ceramic blocks with specific porosity and shape for experiments, and it is difficult to find suppliers for small batch customization on the market?
Answer: We provide a full process customization service from porosity (20% -60%) to external dimensions. Whether it is circular, square or irregular parts, even for small batch orders in the research and development testing stage, we can respond quickly.

Core advantages of the product

1. Excellent thermal performance
   Aluminum nitride (AlN) itself is one of the few materials that combines electrical insulation and high thermal conductivity. After being made into porous blocks, although the density decreases, through process optimization, the thermal conductivity pathway of the skeleton is still efficient, which can quickly dissipate heat from the heat source and avoid local hotspots.
2. Controllable microstructure
   By adopting advanced pore making and sintering processes, we can precisely control the pore size (from submicron to several hundred microns) and pore distribution. This ensures the predictability of fluid resistance and the stability of filtration accuracy.
3. Adaptability to harsh environments
   -High temperature resistance: can be used in oxidizing or non oxidizing atmospheres up to 1000 ℃.
   -Corrosion resistance: It has extremely strong resistance to molten metals, halogen gases, and strong acids and bases.
   -Low expansion: The coefficient of thermal expansion is highly matched with semiconductor silicon wafers, reducing thermal stress.

What problems can we solve?
-Semiconductor etching/deposition equipment: solves the problem of uniform clamping and temperature control of wafers in high-temperature processes.
-Chemical catalysis and filtration: solving the structural collapse problem of catalyst carriers in high-temperature reactions, as well as the precision filtration problem of high viscosity fluids.
-Vacuum welding/packaging: solves the problem of uneven gas escape during the welding process, leading to virtual welding or voids.

Customer Application Cases
Case background:
A well-known semiconductor equipment manufacturer (customer anonymous) encountered difficulties in developing a new generation of 12 inch high-temperature electrostatic chucks. In order to achieve vacuum adsorption of wafers while ensuring temperature uniformity, they need to integrate a ceramic porous layer in the chuck base that has both high thermal conductivity and allows gas to pass uniformly. Traditional metal porous plates have fast thermal conductivity but are prone to pollution and have poor insulation, while ordinary alumina porous ceramics have too slow thermal conductivity.
Solution:
We have customized a high-purity aluminum nitride ceramic porous block for our client.
-Specification customization: The size is a circular ring with a diameter of 300mm, a thickness of 5mm, and the internal through-hole position tolerance is controlled within ± 0.05mm.
-Performance customization: The porosity is controlled at 35% ± 2%, ensuring sufficient back blowing gas flow and maintaining sufficient mechanical strength to support wafer weight.
Final effect:

1. Uniform thermal field: After integration, the surface temperature difference (Δ T) of the electrostatic chuck is reduced from ± 2.5 ℃ to ± 0.8 ℃, greatly improving the etching uniformity.
2. Adsorption stability: The porous structure ensures uniform distribution of airflow, reduces wafer adsorption and desorption time by 20%, and there is no slip phenomenon.
3. Extended lifespan: Compared to previous attempts at coating porous metal solutions, the corrosion resistance lifespan of aluminum nitride ceramic blocks in plasma environments has been increased by more than three times.

Whether it’s standard size stock or deep customized development based on drawings, we can provide you with the best solution for aluminum nitride ceramic porous blocks. Welcome to click on the link below or contact our engineers for samples and quotes, to take your device performance to new heights.

Brudeze Ceramics supplies and sells a wide range of high-quality quartz glass, including alumina ceramics, zirconia ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, boron carbide ceramics, bioceramics, machinable ceramics, etc. We can meet the customization requirements of various ceramic products.