Silicon nitride porous disk

Silicon nitride porous disk is a functional ceramic component made of high-performance silicon nitride (Si ∝ N ₄) ceramic as the substrate, and formed with controllable interconnected pore structure through precision technology. It retains the inherent high hardness, high temperature resistance, and excellent thermal shock resistance of silicon nitride ceramics, as well as the characteristics of uniform permeability, high porosity, and low flow resistance, making it an ideal choice for precision filtration, gas distribution, and vacuum suction cup fixation in extreme environments.

Frequently Asked Questions (FAQ)
Q1: In high temperature or highly corrosive environments, ordinary metal or polymer filter cartridges are prone to deformation or blockage, leading to frequent shutdowns and replacements. Can this product solve this problem?
A1: Absolutely possible. Silicon nitride porous discs, with their excellent high temperature resistance (up to 1200 ℃) and chemical corrosion resistance, maintain structural stability in acidic, alkaline, or high-temperature melts, and have a much longer service life than traditional materials, greatly reducing equipment maintenance frequency.
Q2: How to achieve uniform gas distribution in semiconductor etching or photovoltaic coating processes to ensure consistency in wafer processing?
A2: Our silicon nitride porous disk has a highly uniform microporous structure. When used as a gas distribution disk, it can spray the reaction gas on the wafer surface with extremely high uniformity, ensuring process consistency and yield.
Q3: Can the product be customized according to the size of my device? Can the aperture size be controlled?
A3: Yes, we offer fully customized services. We can adjust the diameter, thickness, porosity, and pore size of the disc according to your drawings or usage scenarios to perfectly match your existing equipment.

Core advantages of the product
The reason why silicon nitride porous disks can be widely used in high-precision fields is due to their irreplaceable material properties and structural design:

1. Excellent material performance: Combining the high strength of silicon nitride with the lightweight porous structure. It has high fracture toughness and good thermal shock resistance, and is not easily cracked even under high and low temperature cyclic impact.
2. Precise pore control: Advanced pore forming technology is adopted, with uniform pore distribution and stable air permeability. Not only can it effectively intercept particles, but it can also ensure extremely low pressure loss.
3. Electrical insulation and thermal conductivity: As an excellent electrical insulator, it also has good thermal conductivity and can work stably in complex environments that require heat dissipation and insulation.

Product application areas
-Semiconductor manufacturing equipment: used as a base for electrostatic suction cups or porous ceramic layers, gas distribution plates, to ensure the stability and heating uniformity of wafers during the process.
-Photovoltaics and LEDs: used as carrier boats or exhaust gas filtration devices in diffusion furnaces to withstand high-temperature corrosive gases.
-Chemical and Energy: Used for direct filtration of high-temperature smoke and dust, catalyst support, and filtration of molten metals to remove impurities and improve casting quality.
-Precision Machinery: As a high-precision air bearing or vacuum adsorption platform, it utilizes its uniform breathability to achieve non-contact handling or fixation of ultra-thin materials.

Customized specifications and sizes
We understand that standard parts often cannot meet complex industrial needs, so we provide highly flexible customized services:
-Geometric dimensions: Diameter range: 10mm~300mm (expandable); Thickness range: 1mm~50mm.
-Pore characteristics: Average pore size: 0.1 μ m~100 μ m; Opening rate: 20% to 60%.
-Shape: In addition to the standard circular shape, it can be processed into a ring-shaped, irregular disc with mounting holes.
-Accuracy: Flatness and parallelism can be controlled at the micrometer level to meet the requirements of precision assembly.

Customer Application Cases
Case: Optimization of Diffusion Process Vehicles for a Photovoltaic Cell Manufacturing Enterprise
-Background/Requirement: When producing high-efficiency PERC cells, the silicon wafers in the diffusion furnace need to withstand high temperatures (>900 ℃) and corrosive gases such as phosphine and chlorine gas. The originally used quartz carrier (Shiyingzhou) undergoes creep deformation under long-term high temperature, and the surface reacts with impurities to produce particles, resulting in silicon wafer contamination and an increase in fragment rate.
-Solution: We have designed and customized a silicon nitride porous disc bearing base for our customers. Utilizing the high-temperature strength and corrosion resistance of silicon nitride to replace traditional quartz structures. At the same time, the design of the porous structure reduces the thermal capacity of the base, making the heating and cooling rate faster, and the micropores can adsorb trace amounts of process residual gases, reducing chamber pollution.
-Final effect: After replacing the porous silicon nitride disk base, the fragmentation problem caused by the deformation of the quartz boat was completely resolved. The cleaning cycle of furnace tubes has been extended by three times, and the production cost of single pieces has been significantly reduced. The overall equipment efficiency (OEE) of the customer’s production line has increased by approximately 5%.

If you are looking for a high-precision porous ceramic solution that can work stably in high temperature and corrosive environments, or if you want to completely solve the downtime problem caused by frequent failures of filtration/load-bearing components, please contact our technical team and submit your drawings or working conditions requirements. We will customize the most suitable silicon nitride porous disk sample for you!

Brudeze Ceramics supplies and sells a wide range of high-quality quartz glass, including alumina ceramics, zirconia ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, boron carbide ceramics, bioceramics, machinable ceramics, etc. We can meet the customization requirements of various ceramic products.