Alumina perforated ceramic disc

Aluminum oxide perforated ceramic disc is a special industrial ceramic component made of high-purity aluminum oxide as the substrate, precision dry pressed or injection molded, and high-temperature sintered. The surface or interior of the disk is distributed with through holes or blind holes arranged in a specific array. With the excellent high temperature resistance, high insulation, high wear resistance, and chemical corrosion resistance of alumina material, combined with its unique pore structure, this product plays an irreplaceable structural and functional role in harsh working conditions such as fluid distribution, precise filtration, thermal insulation and breathability, and semiconductor load-bearing.

Alumina perforated ceramic disc

Frequently Asked Questions (FAQ)
Q1: What is the maximum operating temperature for alumina perforated ceramic discs?
A: It is usually made of 95% to 99.7% alumina and can be safely used for a long time at temperatures ranging from 1600 ℃ to 1700 ℃. It can withstand higher temperatures in a short period of time without softening or deformation.
Q2: Can the aperture size and arrangement on the disc be adjusted?
A: Absolutely possible. We support deep customization services, with pore sizes ranging from micropores (up to a minimum of 0.1mm) to macropores. Hole types include round, square, hexagonal, etc. The arrangement can be staggered or straight, and the hole spacing and opening rate can be accurately designed according to your actual needs.
Q3: Can you provide irregular perforated ceramic plates?
A: Okay. In addition to standard circular discs, we can also customize square, circular, stepped, and irregular perforated ceramic discs with complex structures such as positioning holes and installation slots according to drawings.

Alumina perforated ceramic disc

Core Requirements and Problem Solving
For users, the alumina perforated ceramic disc truly solves the problem of traditional metal materials being prone to corrosion and deformation in extreme environments, and ordinary materials being unable to balance breathability/permeability with structural rigidity. It can enable your equipment to achieve stable gas/liquid distribution, efficient and precise filtration, and high-strength physical support in strong acid and alkali, high-temperature heating, or high-frequency insulation conditions, significantly reducing equipment downtime maintenance frequency and consumable replacement costs.

Alumina perforated ceramic disc

Product Application and Core Advantage Value
1、 Main application areas and value manifestation

Semiconductor and Photovoltaic Manufacturing: Used as a wafer carrier or gas distribution disk in diffusion processes. Value: Ultra high purity does not contaminate wafers, excellent insulation prevents short circuits, uniform pore structure ensures even distribution of process gases, and improves yield.
High temperature kilns and heat treatment: used as refractory partitions, sintering pads, or burner flame plates. Value: Endure extreme thermal shock without shattering, extend the life of kiln core components, effectively improve heat exchange efficiency through hole design, and reduce energy consumption.
Chemical fluid control and environmental filtration: used for gas distribution, catalytic support, or precision filtration of corrosive liquids. Value: Ignoring any acid-base corrosion, high consistency of pore size, ensuring stable flow and controllable filtration accuracy, and preventing metal ion leaching pollution.
2、 Core advantages of the product
Ultimate physical stability: Rockwell hardness reaches HRA85 or above, wear resistance far exceeds that of metals, and long-term use does not enlarge or deform the aperture.
Comprehensive specification customization capability: from micro disks with an outer diameter of 5mm to large load-bearing disks with a diameter of 500mm or more; Thickness ranges from 1mm thin sheet to 50mm thick plate; Pore size, porosity, and flatness (up to ± 0.01mm) can all be customized according to the diagram.
Controllable surface finish: Polishing treatment (Ra ≤ 0.2 μ m) can be provided according to requirements to prevent material from hanging on the wall and blocking holes, making it easy to clean.

Alumina perforated ceramic disc

Customer Application Case (Anonymous)
Background: A well-known semiconductor equipment manufacturer urgently needs a core gas distribution disk when developing a new generation of MOCVD (Metal Organic Chemical Vapor Deposition) equipment.
Facing challenges:
The temperature inside the reaction chamber is as high as 1200 ℃, and MO source gas is introduced, which has strong corrosiveness;
Nearly ten thousand micro holes with a diameter of 0.5mm need to be densely distributed on the surface, and the hole walls must be absolutely smooth and free of burrs, otherwise eddy currents will be generated, resulting in uneven coating thickness on the wafer;
The parallelism of the upper and lower surfaces of the disc should be controlled within 0.02mm to ensure perfect sealing with the cavity.
Our solution:
In response to this demand, we have selected 99% high-purity alumina micro powder and adopted isostatic pressing technology to eliminate internal pores; After sintering, independently developed ultrasonic micro hole precision machining technology is introduced to ensure that the aperture tolerance of 0.5mm micro holes is within ± 0.02mm, and the roughness of the hole wall reaches Ra0.4; Finally, the high-precision double end face grinder was used for grinding, ensuring the ultimate parallelism requirement.
Customer feedback and effectiveness:
After 500 hours of continuous full load limit testing, the customer provided feedback that our perforated ceramic disc not only had no deformation or cracking, but also had a 15% increase in gas flow rate uniformity after passing through the micropores compared to previous products. Ultimately, the film formation uniformity of the wafer successfully met the standard. At present, the component has entered the customer’s supply chain system, achieving stable batch delivery and a 40% reduction in individual procurement costs.

Alumina perforated ceramic disc

Whether you are facing complex fluid distribution challenges or harsh high-temperature insulation conditions, simply provide your drawings or requirements ideas, and we can offer you a one-stop service of “solution evaluation+fast sampling+high-precision customization”.

Brudeze Ceramics supplies and sells a wide range of high-quality quartz glass, including alumina ceramics, zirconia ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, boron carbide ceramics, bioceramics, machinable ceramics, etc. We can meet the customization requirements of various ceramic products.