Pan semiconductor oxide ceramics are a type of high-performance ceramic material widely used in the field of pan semiconductors, mainly including alumina ceramics, zirconia ceramics, etc. These oxide ceramics have various excellent properties, making them indispensable key materials in the pan semiconductor industry.
(1) Aluminum oxide ceramics
Alumina ceramic is a widely used fine ceramic material, characterized by high hardness, high wear resistance, corrosion resistance, good electrical insulation, and high mechanical strength. It has high purity, excellent chemical stability, high resistivity, and can effectively avoid contamination of wafers during semiconductor manufacturing processes. In addition, alumina ceramics also have the characteristics of high temperature resistance and low thermal conductivity, and can be used as insulation materials.
(2) Zirconia ceramics
Zirconia ceramics have the highest toughness and strength at room temperature among fine ceramics. It has excellent wear resistance and high mechanical strength, and can be used to manufacture sliding components such as guide rollers and wear-resistant parts. In the field of general semiconductors, zirconia ceramics can be used to manufacture key components such as ceramic cleavers.
Application
Pan semiconductor oxide ceramics play an important role in multiple aspects of the pan semiconductor industry, and the following are some of the main application areas:
(1) Semiconductor etching equipment
In semiconductor etching equipment, the material in the etching chamber has a significant impact on wafer contamination. High purity alumina ceramics are widely used as protective materials for etching chambers and internal components, which can effectively improve the stability of etching processes and wafer yield. In addition, the gas nozzles, gas distribution plates, and wafer fixing rings of plasma equipment are often made of alumina ceramics.
(2) Wafer polishing process
In the wafer polishing process, alumina ceramics can be widely used in polishing plates, polishing pad correction platforms, vacuum suction cups, and other components. These components require high purity, high chemical durability, and good surface shape and roughness control, and alumina ceramics can meet these demanding requirements. For example, wafer polishing discs made of alumina ceramics can avoid damage or contamination to the wafer during grinding, reduce the introduction of metal ions, and improve the utilization rate of the wafer.
(3) Other applications
Alumina ceramics can also be used to manufacture components such as workbenches, plasma shields/rings in semiconductor equipment. Zirconia ceramics can be used to manufacture ceramic robotic arms for transporting wafers in a vacuum environment.
Customized service
Due to the high precision and performance requirements of the pan semiconductor industry for components, customized services for pan semiconductor oxide ceramics are crucial. Many professional ceramic processing enterprises can provide one-stop customized services from powder granulation molding sintering precision machining testing cleaning according to the specific needs of customers. These enterprises have advanced processing equipment and complete testing equipment, which can ensure the quality and accuracy of their products. For example, Dongguan Nuoyi Precision Ceramic Technology Co., Ltd. can provide customized processing services for alumina ceramic parts, which includes multiple processes such as powder processing, forming, sintering, and precision machining. In addition, some companies also have experience in semiconductor production and cleaning, which can better meet the needs of the general semiconductor industry.
Pan semiconductor oxide ceramics play an irreplaceable role in the field of pan semiconductors due to their excellent performance. Professional customized services can meet the personalized needs of different customers and provide strong support for the development of the semiconductor industry.
Brudeze Ceramics supplies and sells a wide range of high-quality quartz glass, including alumina ceramics, zirconia ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, boron carbide ceramics, bioceramics, machinable ceramics, etc. We can meet the customization requirements of various ceramic products.
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