Alumina ceramic semiconductor etching ring is a key material widely used in semiconductor manufacturing, mainly made of high-purity alumina, with a variety of excellent properties and a wide range of application scenarios.
Эксплуатационные характеристики
High purity and stability: Alumina ceramics have high purity, stable material structure, and can withstand high temperature environments, making them suitable for high-temperature processes in semiconductor manufacturing.
Устойчивость к коррозии: Alumina ceramic rings can resist the corrosion of corrosive media such as acids and alkalis, maintain the stability of the material, and are suitable for use in chemical corrosion and plasma environments.
Изоляционные свойства: Alumina ceramics have good insulation properties, which can prevent the flow of current, reduce metal ion contamination on the wafer surface, and ensure high yield of semiconductor devices.
Высокая твердость и износостойкость: Alumina ceramic rings are second only to diamond in hardness, providing excellent wear resistance, reducing wear on equipment components and prolonging lifespan.
Высокая механическая прочность: Alumina ceramic rings have excellent mechanical strength and can operate stably for a long time in harsh working environments.
Application scenario
Etching equipment: In semiconductor etching equipment, alumina ceramics are mainly used as protective materials for etching cavities and internal components, such as gas nozzles, gas distribution plates, and wafer retaining rings.
Wafer processing equipment: Alumina ceramic rings are widely used for mechanical arms and other components in wafer handling due to their high hardness and wear resistance.
High-temperature and high-pressure processes: Alumina ceramic rings are also used in components such as high-temperature heaters and electrostatic chucks to ensure temperature uniformity and improve process stability.
Packaging and testing: In power semiconductor packaging, alumina ceramics are used as substrate materials to provide high insulation and heat dissipation; ceramic probe cards achieve stable high-frequency signal transmission during chip testing due to their high precision and wear resistance.
Alumina ceramic semiconductor etch rings have become an indispensable key material in semiconductor manufacturing due to their excellent physical, chemical and mechanical properties, and are widely used in etching equipment, wafer processing equipment, high temperature and high pressure processes, as well as packaging and testing.
