What are the solutions for Macor ceramic drilling/cutting


Macor ceramics have been widely used in high-end manufacturing fields such as semiconductors, medical devices, and optical devices due to their excellent high temperature resistance, strong insulation, and zero porosity. However, its high hardness (Mohs hardness 5.5-6) and brittleness make traditional processing techniques prone to problems such as edge breakage and microcracks, limiting design freedom and yield. Here are some effective solutions for drilling and cutting Macor ceramics:

1、 Drilling processing method

  1. Ultrasonic assisted drilling technology (USM)
    -Suitable for ultra-thin wall drilling, capable of achieving micro hole processing with a diameter of 0.3mm and a depth to diameter ratio of 10:1, with an inner wall roughness of ≤ Ra 0.8 μ m. This technology uses ultrasonic vibration to assist drilling, which can effectively reduce drilling force and thermal effects, and avoid the occurrence of edge breakage and microcracks.
    -For example, in the processing of micro sensor packaging and fiber optic connectors, ultrasonic assisted drilling technology can ensure high precision and quality.
  2. Five axis linkage laser cutting system
    -Support drilling at any angle from 0 ° to 90 °, with an accuracy of ± 0.02mm. This system can meet the requirements of complex structural components, such as the processing of irregular structures such as aerospace gyroscope cavities.
    -The advantage of laser cutting is that it can accurately control the processing path and parameters, reduce the heat affected zone, and avoid material performance degradation.
  3. Traditional drilling optimization
    -The cemented carbide Fried Dough Twists drill or flat head drill shall be used, with the rotating speed of 1500-1700rpm and the feed speed of 20-30mm per minute. For large diameter holes, it is recommended to use a step-by-step drilling method, drilling small holes first and then gradually expanding them to ensure smooth and undamaged hole walls.
    -During the drilling process, it is necessary to regularly check the sharpness of the drill bit and chamfer both ends of the hole before drilling to prevent edge breakage.

2、 Cutting and processing methods

  1. Diamond wire cutting technology (DWEDM)
    -Suitable for ultra-thin cutting, it can ensure that thin sheets with a thickness of 0.2mm have no warping or edge breakage, and the yield rate is increased to over 98%. This technology achieves cutting through high-speed reciprocating motion of diamond wire, coupled with dynamic control of coolant, which can effectively reduce thermal effects and mechanical stress.
    -For example, in the processing of complex components such as medical endoscope mounts, diamond wire cutting technology can achieve high-precision and high-quality cutting.
  2. 3D laser scanning path planning
    -Support non-standard contour processing such as arc and wave shapes, with a tolerance of up to ± 0.015mm. By using 3D laser scanning technology to plan the cutting path, the cutting path and parameters can be accurately controlled, achieving high-precision cutting of complex shapes.
    -For example, in the processing of optical and laser devices, 3D laser scanning path planning can ensure high-precision cutting and adapt to high-precision optical assembly.
  3. Traditional sawing optimization
    -Choose diamond saw or silicon carbide saw blade for sawing, maintain appropriate cutting speed and coolant supply. Diamond saws are favored for their higher cutting efficiency, but when using silicon carbide saw blades, it is necessary to reduce the cutting speed to minimize wear.
    -During the sawing process, it is recommended to use water-soluble cutting fluid to effectively wash away the chips generated during machining, protect the machine tool, and avoid tool overheating.

3、 Zero damage machining technology

  1. Control of heat affected zone
    -By intelligently adjusting laser parameters, the temperature in the processing area is controlled below 80 ℃ to avoid insulation performance degradation caused by material phase transition. This technology can guarantee the performance of materials from the source and ensure that the processed components meet the design requirements.
  2. Edge reinforcement processing
    -By adopting a unique chemical mechanical polishing (CMP) process, the edge bending strength is increased by 30% after processing, eliminating the hidden danger of microcracks. This treatment can effectively improve the mechanical performance and reliability of components, and extend their service life.

4、 Full process service chain

  1. Process simulation optimization
    -Predicting the stress distribution during machining through finite element analysis (FEA), optimizing tool paths and parameters, and reducing trial and error costs. This simulation technology can predict possible problems that may occur during the machining process in advance, optimize machining plans, and improve machining efficiency and quality.
  2. Smart Device Matrix
    -Using imported ultrafast laser cutting machine (pulse width<10ps), high-precision five axis ultrasonic machining center, and self-developed diamond wire cutting system (wire diameter 0.1mm). These advanced equipment can achieve high-precision and high-efficiency processing, meeting the manufacturing needs of complex structural components.
  3. Detection and post-processing
    -We use three coordinate measurement (with an accuracy of 0.001mm) to fully inspect key dimensions and provide value-added services such as coating, metallization, and vacuum brazing. These testing and post-processing techniques can ensure that the processed components meet design requirements and meet subsequent usage needs.

5、 Industry application scenarios

  1. Semiconductor equipment
    -In the processing of key components in wafer transfer systems, such as vacuum suction cup air hole processing and RF cavity cutting, high-precision drilling and cutting techniques can ensure the stability of wafer transfer and the efficiency of 5G chip packaging.
  2. Medical equipment
    -In the processing of ceramic surgical knife handles, the use of high-precision drilling technology can ensure a tight connection between the handle and the blade, while avoiding microcracks during the processing, thereby improving the reliability and service life of the surgical knife. For example, through a five axis linked laser cutting system, complex shaped tool holders can be cut with an accuracy of ± 0.01mm, meeting the high-precision requirements of minimally invasive surgical instruments.
    -Under the trend of miniaturization of medical devices, ultrasound assisted drilling technology is widely used in the packaging of microsensors and the processing of implantable medical devices. For example, in the processing of ceramic shells for implantable pacemakers, micro hole machining with a diameter of 0.3mm and a depth to diameter ratio of 10:1 can be achieved through ultrasound assisted drilling technology, and the inner wall roughness is ≤ Ra 0.8 μ m, ensuring the sealing and reliability of the device.
  3. Optics and laser devices
    -In the processing of optical devices, 3D laser scanning path planning technology can achieve high-precision cutting and adapt to high-precision optical assembly. For example, in the processing of optical lenses, laser cutting can achieve the processing of non-standard contours such as arcs and waves, with a tolerance of up to ± 0.015mm, ensuring the accuracy and performance of optical devices.
    -Diamond wire cutting technology is widely used for cutting laser casings in laser processing. For example, for cutting thin films with a thickness of 0.2mm, diamond wire cutting technology can ensure no warping or edge breakage, and the yield rate can be increased to over 98%, meeting the strict requirements of laser for processing accuracy and quality.
  4. Aerospace
    -In the aerospace industry, Macor ceramics are commonly used to manufacture insulation components and complex structural parts in high-temperature environments. For example, in the processing of aerospace gyroscope cavities, the five axis linkage laser cutting system can achieve drilling at any angle from 0 ° to 90 °, with an accuracy of ± 0.02mm, meeting the processing requirements of complex structural components.
    -In the machining of high-temperature components in aircraft engines, the use of ultrasonic assisted drilling technology can achieve high-precision micro hole machining, avoiding the performance degradation of materials in high-temperature environments. For example, in the machining of cooling holes in engine blades, ultrasonic assisted drilling technology can achieve micro hole machining with a diameter of 0.3mm and a depth to diameter ratio of 10:1, ensuring the cooling effect and service life of engine blades.
  5. Electronics and Communication
    -In the processing of electronic devices, Macor ceramics are commonly used to manufacture insulation components and high-frequency devices. For example, in 5G communication equipment, Macor ceramics are used to manufacture high-frequency filters and insulation bases. Through high-precision drilling and cutting technology, high-precision micro hole machining and complex shape cutting can be achieved, ensuring the high-frequency performance and reliability of the equipment.
    -In the field of electronic packaging, diamond wire cutting technology is widely used for cutting packaging shells. For example, in micro sensor packaging, diamond wire cutting technology can achieve thin film cutting with a thickness of 0.2mm, without warping or edge breakage, and the yield rate can be increased to over 98%, meeting the strict requirements of electronic packaging for processing accuracy and quality.

The processing difficulty of Macor ceramics is relatively high, but by using advanced drilling and cutting techniques such as ultrasonic assisted drilling technology, five axis linked laser cutting system, diamond wire cutting technology, etc., the difficulties in the processing can be effectively solved, and the processing accuracy and quality can be improved. Meanwhile, with the support of the full process service chain, including process simulation optimization, intelligent device matrix, detection and post-processing, processing efficiency and yield can be further improved.

In different industry application scenarios, these technologies can meet the high-precision and high-quality requirements for Macor ceramic processing in fields such as semiconductor equipment, medical equipment, optical and laser devices, aerospace, electronics and communication. With the continuous advancement and innovation of technology, the processing technology of Macor ceramics will become more mature, providing stronger support for the development of high-end manufacturing fields.

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