Is alumina ceramic a semiconductor ceramic

Basic characteristics of alumina ceramics
Aluminum oxide ceramic (Al ₂ O3 ceramic) is a high-performance ceramic material with α – type aluminum trioxide (α – Al ₂ O3) as the main crystal phase, which has the following significant characteristics:
-High hardness and wear resistance: The Mohs hardness can reach 8-9, second only to diamond.
-High melting point and high temperature stability: The melting point is about 2072 ° C, and it can maintain stability in high temperature environments.
-Excellent electrical insulation performance: With a volume resistivity of up to 10 ¹⁴ -10 ¹⁶Ω· cm, it is an ideal electrical insulation material.
-Good chemical stability: Excellent resistance to acids, bases (except hydrofluoric acid), and plasma.
-Low thermal expansion coefficient: Similar to silicon materials (7-8 × 10 ⁻⁶/℃), it can reduce thermal stress.

Is alumina ceramic a semiconductor ceramic
Aluminum oxide ceramics are not semiconductor ceramics. The conductivity of semiconductor ceramics is between that of conductors and insulators, and its conductivity varies significantly with external factors such as temperature, humidity, light, electric field, and magnetic field. Aluminum oxide ceramics have high electrical resistivity and excellent electrical insulation properties, but their conductivity is extremely low, which does not meet the definition of semiconductor materials.

Application of alumina ceramics in the semiconductor field
Although alumina ceramics themselves are not semiconductor materials, their excellent insulation properties, high temperature stability, and chemical stability make them widely used in the semiconductor field

1. Integrated circuit packaging substrate: Aluminum oxide ceramics are used for multi-layer ceramic substrates to carry chips and achieve electrical connections.
2. Key components of semiconductor manufacturing equipment: Alumina ceramic components are widely used in etching chambers, gas nozzles, wafer stages, etc. Their high purity (≥ 99.5%) can prevent contamination of the wafer.
3. Insulation and heat dissipation function: The thermal conductivity (20-30 W/(m · K)) and low dielectric loss of alumina ceramics make it an ideal insulation material, suitable for high-frequency and high-voltage environments.

Aluminum oxide ceramics are indispensable insulation materials in semiconductor manufacturing due to their high insulation and stability, rather than semiconductor ceramics. Its wide application in semiconductor devices is mainly due to its excellent physical, chemical, and mechanical properties.