Application of Macor Ceramic Bracket in Vacuum Coating Machine


The performance of vacuum coating machines directly affects the quality and production efficiency of thin films in precision manufacturing fields such as semiconductors, optical coatings, and aerospace. As the core load-bearing component of the coating process, the performance of the support material determines the uniformity, cleanliness, and equipment lifespan of the coating. Macor ceramic brackets are becoming a revolutionary solution in the field of vacuum coating due to their low gas release rate, high temperature resistance, and high stability.

The four core advantages of Macor ceramic brackets

  1. Extremely low gas release rate, ensuring the purity of the coating
    The gas release rate of Macor ceramics in a vacuum environment is as low as negligible (<1 × 10 ⁻⁹ Torr · L/s · cm ²), and almost no gas molecules are released, avoiding film impurity pollution caused by material volatilization during the coating process. This characteristic makes it an ideal choice for optical coating and semiconductor wafer coating, significantly improving coating yield.
  2. High temperature resistance and thermal stability, suitable for extreme working conditions
    Macor ceramics can withstand continuous high temperatures of 800 ℃, with peak temperatures up to 1000 ℃, and their thermal expansion coefficient (9.3 × 10 ⁻⁶/K) is close to that of metals, maintaining dimensional stability in the high-temperature chamber of the coating machine and avoiding coating displacement caused by thermal deformation.
  3. Zero pore structure, eliminating pollution adsorption
    Its non porous surface and non hygroscopic properties can prevent residual coating materials or liquid penetration, especially suitable for complex coating environments in PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) processes, ensuring long-term use without pollution risks.
  4. Precision machining capability, adaptable to complex designs
    Macor ceramics can achieve a tolerance of ± 0.01mm through CNC machining, supporting non-standard designs such as porous supports and curved load-bearing structures, meeting the load-bearing requirements of high-precision optical thin films and nanoscale semiconductor coatings.

Core application scenarios in vacuum coating machines

  1. Optical Coating: Guardian of High Precision Thin Films
    -Laser reflector bracket: The low thermal expansion characteristic ensures the stable position of the reflector during the coating process, avoiding optical path deviation caused by temperature fluctuations, and improving the uniformity of the anti reflective film and high reflective film.
    -Optical lens carrier: Surface smoothness Ra<0.4 μ m, reducing coating surface defects and ensuring the transmittance and reflectivity of optical devices.
  2. Semiconductor coating: the cornerstone of nanoscale processes
    -Wafer coating tray: corrosion-resistant and resistant to etching gases (such as Cl ₂, SF ₆), extending equipment maintenance cycles to more than three times that of traditional metal supports.
    -MOCVD reaction chamber support: No volatile release at high temperatures, ensuring high-purity growth of gallium nitride (GaN) and silicon carbide (SiC) epitaxial layers.
  3. Aerospace Coating: Reliable Support for Extreme Environments
    -Engine blade coating fixture: can withstand plasma spraying environment at 1500 ℃, ensuring uniform adhesion of thermal barrier coating (TBC) and improving the high-temperature resistance of blades.
    -Satellite optical component bracket: vacuum compatibility and radiation resistance, suitable for extreme space environments, with a coating life of over 10 years.

Processing and customization advantages of Macor ceramic brackets

  1. Precision molding of complex structures
    Support laser cutting, ultrasonic drilling and other processes to achieve extreme designs such as 0.5mm aperture micro hole arrays and 0.3mm thickness thin-walled supports, suitable for ultra-thin coating substrate requirements.
  2. Rapid response and cost optimization
    -No sintering process required: direct machining reduces production cycle by 30%, and samples can be delivered quickly in 3 days.
    -Surface metallization treatment: It can be coated with metal layers such as gold and nickel to enhance the adhesion with the coating material and reduce interface defects.

The three core values of choosing Macor ceramic brackets

  1. Coating quality upgrade
    Double guarantee of cleanliness and stability, with a film uniformity improvement of over 20%.
  2. Extended lifespan of equipment
    High temperature resistance and corrosion resistance characteristics extend the maintenance cycle to three times that of traditional materials.
  3. Whole cycle cost optimization
    Yield improvement and maintenance cost reduction, with a 40% shortened investment return cycle.

Macor ceramic brackets have redefined the performance standards of vacuum coating technology through breakthroughs in materials science. Whether pursuing nanoscale precision semiconductor coatings or challenging optical thin films, Macor ceramics can provide highly stable, zero pollution, and strongly adaptable solutions.

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