Applicability and Application of Macor Ceramics in Vacuum Environment

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1、 Characteristics of Macor ceramics
Macor ceramic (microcrystalline glass ceramic) is a high-performance material produced by Corning Incorporated in the United States, with unique physical and chemical properties that enable it to perform well in vacuum environments.

1. Low gas release rate: The gas release rate of Macor ceramics in a vacuum environment is extremely low, almost negligible (<1 × 10 ⁻⁹ Torr · L/s · cm ²), which can effectively avoid the release of gas molecules and maintain the purity of the vacuum chamber.
2. High temperature resistance: Macor ceramics can withstand continuous use temperatures up to 800 ℃, with a peak temperature of up to 1000 ℃. Its thermal expansion coefficient is similar to that of metals and glass, and it can maintain dimensional stability under severe temperature changes.
3. Zero porosity structure: Macor ceramics have zero porosity and zero moisture absorption, which can prevent gas adsorption and permeation even in humid or high-pressure environments, ensuring the long-term stability of vacuum systems.
4. Excellent mechanical and chemical stability: Macor ceramics have high hardness (Mohs hardness 5.5) and corrosion resistance, which can resist corrosion from acid, alkali, and radiation environments.
5. Good processability: Macor ceramics can be cut, drilled, polished, and processed using traditional CNC equipment, with tolerance control up to ± 0.05mm or even higher precision, without the need for secondary sintering, greatly shortening the production cycle.

2、 Application scenarios of Macor ceramics in vacuum environment
Macor ceramics have been widely used in various high-tech fields, especially in vacuum environments, due to their excellent performance.

1. Aerospace field
   -Thermal insulation material: When the spacecraft returns to Earth, Macor ceramics can withstand frictional high temperatures up to 1000 ℃, protecting the internal equipment of the spacecraft from damage.
   -Electronic component packaging: Its excellent insulation and dimensional stability ensure reliable operation of electronic components in vacuum and radiation environments.
   -Vacuum sealing components: such as spacecraft door and window hinges and buckles, Macor ceramics, with their radiation resistance and low exhaust characteristics, can ensure a vacuum environment inside the cabin for decades.
2. Semiconductor and laser equipment
   -Vacuum coating machine bracket: The low gas release rate of Macor ceramics can ensure the uniformity of film deposition and improve chip yield.
   -Laser cavity and reflector: Their high temperature resistance and precision machining capabilities support stable output of high-power lasers.
   -Wafer coating tray: corrosion-resistant and resistant to etching gases (such as Cl ₂, SF ₆), extending equipment maintenance cycles to more than three times that of traditional metal supports.
3. Medical and research instruments
   -Mass spectrometer and gas analyzer: The zero emission characteristic of Macor ceramics ensures the accuracy of measurement data and avoids background interference.
   -Biosensor substrate: Its chemical inertness can protect the purity of biological samples and is suitable for in vitro diagnostic equipment.
4. Core applications in vacuum coating machines
   -Optical coating: For example, for laser reflector brackets and optical lens carriers, the low thermal expansion characteristics of Macor ceramics can ensure the stability of the reflector position during the coating process, avoiding optical path deviation caused by temperature fluctuations.
   -Semiconductor coating: such as wafer coating trays and MOCVD reaction chamber supports, the corrosion resistance and non-volatile release characteristics of Macor ceramics can ensure high-purity growth of gallium nitride (GaN) and silicon carbide (SiC) epitaxial layers.

3、 Processing and customization advantages of Macor ceramics
The processing and customization capabilities of Macor ceramics further enhance their applicability in vacuum environments.

1. Precision forming of complex structures: Macor ceramics can achieve extreme designs such as 0.5mm aperture micro hole arrays and 0.3mm thickness thin-walled supports through processes such as laser cutting and ultrasonic drilling, adapting to the requirements of ultra-thin coated substrates.
2. Rapid response and cost optimization: No sintering process is required, direct machining can shorten the production cycle by 30%, and samples can be delivered quickly in 3 days.
3. Surface metallization treatment: Macor ceramics can be coated with metal layers such as gold and nickel to enhance their adhesion with coating materials and reduce interface defects.

4、 Reasons for choosing Macor ceramics

1. Reliability: Macor ceramics have passed RoHS certification and comply with international environmental and safety standards.
2. Economy: Long lifespan and low maintenance costs, reducing the total lifecycle cost by more than 40%.
3. Customization: Supports non-standard design and fast prototyping, which can meet diverse customer needs.

Macor ceramics are redefining the boundaries of precision manufacturing with their outstanding performance in vacuum environments. Whether pursuing extreme stability in aerospace engineering or requiring ultra-high cleanliness in semiconductor production lines, Macor Ceramics can provide reliable, efficient, and sustainable solutions.