그리고 center perforated alumina ceramic pulley is an advanced ceramic component mainly composed of high-purity α – Al ₂ O3 crystal phase, which is made through isostatic pressing, high-temperature sintering, and precision machining processes. Its core material has an alumina content of over 99.5%.
핵심 기능:
Extreme environmental adaptability: With a melting point of up to 2072 ℃, it can work stably in an environment of 1600 ℃ for a long time, with excellent heat shock resistance and a thermal expansion coefficient only one-third of that of metals.
Ultra wear resistance: Mohs hardness level 9, wear resistance is 150 times that of manganese steel, and the wear rate under dry friction conditions is less than 0.01mm ³/N · m.
고정밀 가공: Using a five axis linked ceramic engraving and milling machine for machining, the center aperture tolerance is controlled within ± 0.005mm, and the surface roughness Ra is ≤ 0.2 μ m.
Insulation characteristics: Volume resistivity>10 ¹⁴Ω· cm, dielectric strength up to 20kV/mm, suitable for strong electric field environments.
Typical application case: In a semiconductor wafer handling robot, after continuous operation for 12 months, the wear of a certain type of ceramic pulley is only 0.03mm, which is 8 times longer than that of traditional metal pulleys.
Core application scenario: Addressing industry pain points
- Semiconductor manufacturing equipment
Wafer transfer system: As a key rotating component of the robotic arm, the central perforation design integrates vacuum adsorption and gas cooling dual channels to solve the problem of thermal deformation during wafer handling.
Plasma etching chamber: using high-purity alumina coated pulleys to control metal ion contamination at ppb level, improving etching uniformity by 30%.
Chemical mechanical polishing (CMP): The surface of the pulley is coated with a diamond-like carbon (DLC) film, which reduces the friction coefficient to 0.05 and significantly reduces the wear of the polishing pad. - Photovoltaic industry
Silicon wafer cutting line guide wheel: Aluminum oxide ceramic pulley replaces traditional resin wheel, extending the lifespan of the wire saw from 500 hours to 3000 hours and achieving cutting accuracy of ± 1 μ m.
Polycrystalline silicon reduction furnace: The central perforated structure realizes hydrogen circulation cooling, controlling the temperature gradient inside the furnace within ± 5 ℃, and increasing the single furnace output by 15%. - High end textile machinery
Jet loom guide wheel: The surface of the ceramic pulley is treated with micropores (aperture 5-10 μ m), effectively reducing static electricity accumulation and reducing the warp breakage rate to 0.3 times per 10000 meters.
Carbon fiber prepreg production line: using self-lubricating alumina ceramic pulleys, reducing the surface scratch rate of prepreg from 2% to 0.05%. - Special industrial scenarios
Nuclear fuel rod testing equipment: The performance degradation rate of radiation resistant alumina ceramic pulleys under 60Co gamma ray irradiation is less than 0.1% per year.
Deep sea exploration equipment: Through extreme temperature testing from -40 ℃ to 150 ℃, it solves the problem of jamming caused by thermal expansion and contraction of traditional metal components.
Customized service system
- 머티리얼 커스터마이징
Purity grading: Three material options are available: 99.5% (semiconductor grade), 99.9% (optical grade), and 99.99% (nuclear grade).
Composite modification: SiC whiskers (volume fraction 5-15%) can be added to enhance fracture toughness, or MgO (0.3-0.5wt%) can be doped to reduce sintering temperature. - 구조 최적화
Hole system design: supports processing of single hole, multiple hole, and irregular hole (such as plum blossom hole and square hole), with a minimum pore size of up to 0.5mm.
Lightweight structure: using topology optimization technology to reduce weight by 30-50% while ensuring strength. - 표면 처리
Precision grinding: Achieve a mirror level surface (Ra ≤ 0.05 μ m) and reduce the friction coefficient to 0.02.
Functional coating: Available in PTFE coating (anti friction), Al ₂ O ∝ – TiC composite coating (wear-resistant), Y ₂ O ∝ coating (anti plasma erosion) and other options.
Technical Support System: Ensuring Product Reliability
소결 과정: Adopting oscillation pressure sintering technology, achieving 99.9% theoretical density at 1600 ℃, with grain size controlled within 1-3 μ m.
Non destructive testing: Use X-ray computed tomography (CT) to detect internal defects and ensure porosity<0.1%.
Life prediction: Based on the Archard wear model, a digital twin system can be established to predict the pulley replacement cycle 6 months in advance.
Typical customer case: After adopting customized center perforation pulleys, an international semiconductor equipment giant achieved an 18% increase in overall equipment efficiency (OEE) and a $420000 reduction in annual maintenance costs. This product has now passed SEMI S2/S8 certification and become a standard configuration component for 12 inch wafer fabs.
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