Precision porous silicon carbide ceramic suction cup is a high-performance adsorption tool widely used in semiconductor, electronic, photovoltaic and other fields. It is made of high-purity silicon carbide powder as the base material through reaction sintering (RBSN) or gel casting process, and has both porous structure and excellent performance of silicon carbide.
-Material characteristics: Silicon carbide has high hardness (HV10 2200-2800), high thermal conductivity (thermal conductivity of 120W/m · K, 5 times that of alumina), high temperature resistance (long-term temperature resistance of 1600 ° C), and good thermal shock resistance (△ T ≥ 500 ° C).
-Structural features: Porous structure design, porosity of 30% -70%, controllable pore size of 1-50 μ m, able to provide uniform adsorption force, vacuum adsorption force ≥ 0.08MPa.
-Processing accuracy: Flatness ≤ 0.005mm, capable of meeting high-precision processing requirements.
Application
Precision porous silicon carbide ceramic suction cups have demonstrated extensive application value in multiple fields due to their excellent performance
Semiconductor and Electronics Industry
-Wafer thinning and bonding: Suitable for thinning and bonding processes on 12 inch wafers, the porous structure can uniformly adsorb the wafer, ensuring flatness.
-Photolithography machine thermal management: fast heat conduction, control silicon wafer temperature fluctuations of ≤± 0.1 ° C, improve exposure accuracy.
Photovoltaic and New Energy
-Battery sintering furnace: temperature resistance of 1600 ° C, carrying silicon wafers without deformation, fragment rate ≤ 0.01%, suitable for sintering PERC/TOPCon batteries.
-Silicon carbide epitaxial tray: high purity (metal impurities ≤ 1ppm), suitable for SiC epitaxial growth (MOCVD/MBE).
Laser and Precision Machining
-High power laser cutting: resistant to laser ablation (power density ≥ 1kW/cm ²), suitable for cutting materials such as glass and ceramics.
-3D printing substrate: porous and breathable, reduces powder adhesion, and improves the efficiency of printed part peeling.
High temperature industrial equipment
-Sintering furnace bearing plate: resistant to high temperature creep, bearing capacity ≥ 50kg/m ² (1600 ° C), suitable for ceramic and metal powder sintering.
-Vacuum brazing fixture: resistant to solder (Ag Cu Ti) corrosion, reusable ≥ 1000 times.
Customized service
To meet the diverse needs of different customers, precision porous silicon carbide ceramic suction cups provide comprehensive customized services:
Customization of size and shape
-Size range: diameter from 100mm to 600mm, thickness from 5-50mm, supporting irregular structures such as sectors and rectangles.
-Shape customization: Different shapes of suction cups can be customized according to customer needs to meet special process requirements.
Pore design
-Porosity: adjustable from 30% to 70%.
-Pore size: 1-50 μ m controllable, suitable pore size can be selected according to the characteristics of the adsorption object.
-Pore structure: Supports various pore structure designs such as uniform pores, gradient pores, and directional channels, suitable for vacuum adsorption, gas permeation, and other requirements.
Surface Treatment
-Wear resistant coating: CVD silicon carbide coating can be provided to enhance surface wear resistance.
-Anti oxidation coating: SiO ₂ or Al ₂ O3 anti-oxidation coating can be selected to extend the service life.
Precision porous silicon carbide ceramic suction cups have become indispensable high-performance tools in fields such as semiconductors, photovoltaics, and precision machining due to their excellent performance and flexible customization services.
Brudeze Ceramics supplies and sells a wide range of high-quality quartz glass, including alumina ceramics, zirconia ceramics, silicon nitride ceramics, aluminum nitride ceramics, silicon carbide ceramics, boron carbide ceramics, bioceramics, machinable ceramics, etc. We can meet the customization requirements of various ceramic products.
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