Silicon carbide ceramic chuck

Silicon carbide ceramic chuck is a kind of high performance vacuum chuck.

High temperature resistance: Silicon carbide ceramics have excellent high temperature performance, and their high temperature resistance far exceeds that of traditional materials. Silicon carbide ceramic vacuum suction cups can maintain stable performance in high temperature environments, are not easy to soften or deform, and are suitable for vacuum adsorption in high temperature occasions.
Good corrosion resistance: Silicon carbide ceramics have extremely high chemical stability and can resist the erosion of most acids, alkalis, salts and other chemicals. Therefore, the application of silicon carbide ceramic vacuum chucks in corrosive environments has significant advantages.
Excellent wear resistance: Silicon carbide ceramics have extremely high hardness and excellent wear resistance. Silicon carbide ceramic vacuum suction cups have a long service life in harsh environments such as high temperature, corrosion and wear, reducing maintenance and replacement costs.
Lightweight and high-strength characteristics: Silicon carbide ceramic materials have high strength and low density, which makes silicon carbide ceramic vacuum chucks lighter in weight while maintaining strength, reducing equipment burden and improving handling efficiency.
High hardness and high wear resistance: Silicon carbide ceramic suction cups are famous for their high hardness, high wear resistance and high temperature stability, especially suitable for heavy industries such as steel and chemical industry.
Porous structure: the pore size distribution of the porous ceramic chuck is uniform, the particle thickness of the microporous ceramic chuck is uniform, and the surface of the processed porous ceramic chuck plate is smooth and flat after grinding.
Widely used: Silicon carbide ceramic vacuum chuck is widely used in the process of semiconductor production, such as thinning, dicing, cleaning, handling, etc. It is a special tool for adsorbing load in various semiconductor production processes.

Due to its excellent physical and chemical properties, silicon carbide ceramic chucks have shown a wide range of application prospects and significant advantages in many fields.