Braccio robotico in ceramica allumina per semiconduttori

Braccio robotico in ceramica allumina per semiconduttori is one of the key components in semiconductor equipment, usually made of high-purity alumina (over 99%), with excellent physical and chemical properties. It is widely used in the front-end processes of semiconductor manufacturing, responsible for wafer transport, transportation, and precise positioning. It has become an indispensable tool in semiconductor production due to its high cleanliness, high stability, high precision, high efficiency, and high reliability.

Caratteristiche del materiale
Allumina di elevata purezza: The main material for semiconductor alumina ceramic robotic arms is high-purity alumina, which has physical properties such as density, high hardness, and high wear resistance. High purity alumina ensures the mechanical strength, heat resistance, and corrosion resistance of the robotic arm, and can maintain stable performance in extreme environments.
Resistenza alle alte temperature: The melting point of alumina ceramics is as high as 2050 ℃. Even in high-temperature environments, the robotic arm can maintain a low deformation rate, ensuring the stability and safety of the wafer during heat treatment.
Resistenza all'usura: The hardness of alumina ceramics is second only to diamond, far exceeding steel and chromium steel, and has good wear resistance, which can effectively extend the service life of robotic arms.
Resistenza alla corrosione: Alumina ceramics have excellent chemical stability and will not leave small particles or charged particles with pollution on contact objects. They will not produce metal ions, ensuring the cleanliness of the wafer during transportation.
High Insulation: Alumina ceramics have high electrical resistivity and strong insulation strength at room temperature, and can maintain good insulation performance even in high temperature environments, ensuring the safety of wafers during transportation.

Product mix
The semiconductor alumina ceramic robotic arm is mainly composed of a controller, driver, arm, and end effector. Among them, the end effector is a key component of the robotic arm, made of alumina ceramic, responsible for directly contacting the wafer, completing the wafer’s handling and positioning.
Controller: responsible for receiving instructions and controlling the motion trajectory and speed of the robotic arm.
Driver: Provides the power required for the movement of the robotic arm, ensuring that it can complete various actions smoothly and quickly.
Arm: The part that connects the controller and the end effector, responsible for delivering the end effector to the designated position.
End effector: Made of alumina ceramic, it has the characteristics of high hardness, high wear resistance, and high cleanliness, and is responsible for direct handling and positioning of wafers.

Vantaggi del prodotto
Alta precisione: The aluminum oxide ceramic robotic arm has high flatness and smoothness, with a dimensional accuracy of ± 0.001mm, which can meet the high-precision requirements for wafer positioning in semiconductor manufacturing.
High cleanliness: Alumina ceramics have good chemical stability and will not leave contaminating particles on the wafer, ensuring the cleanliness of the wafer.
Alta affidabilità: Aluminum oxide ceramic robotic arms have excellent physical and chemical properties, which can maintain stable working conditions in extreme environments, improving the reliability and service life of the equipment.
Antistatico: Alumina ceramics have good anti-static properties, which can prevent wafers from being contaminated by other particles during transportation.

Area di applicazione
Semiconductor alumina ceramic robotic arms are widely used in the front-end processes of semiconductor manufacturing, such as wafer cutting, polishing, etching, ion implantation, etc. In these processes, the robotic arm needs to frequently transport and position wafers, with extremely high requirements for material performance. Aluminum oxide ceramic robotic arms have become an ideal choice in semiconductor manufacturing due to their excellent performance.

Semiconductor alumina ceramic robotic arms play an important role in semiconductor manufacturing due to their excellent physical and chemical properties. With the continuous development of semiconductor technology, the application scope of alumina ceramic robotic arms will continue to expand, providing strong support for the development of the semiconductor industry.